Deposition and properties of ZrNx films produced by radio frequency reactive magnetron sputtering

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 1486-1493

  Rizzo, A ^a   A Signore, M ^a   Mirenghi, L ^a   Dimaio, D ^a  

^a ENEA   (Italy)

Author keywords

Optical properties; XPS; Zirconium nitride

Indexed keywords

MAGNETRON SPUTTERING; NATURAL FREQUENCIES; OPTICAL CORRELATION; OPTICAL PROPERTIES; SPECTROPHOTOMETERS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL STATES; RADIO FREQUENCY REACTIVES; ZIRCONIUM NITRIDES;

ZIRCONIUM COMPOUNDS;

EID: 33751205351     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.04.012     Document Type: Article

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