Saturated thickness of nitride layers formed by high fluence nitrogen implantation into metals

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 765-769

  Miyagawa, Y ^a   Nakao, S ^a   Ikeyama, M ^a   Saitoh, K ^a   Miyagawa, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COMPUTER SIMULATION; COMPUTER SOFTWARE; HAFNIUM; IRON; MONTE CARLO METHODS; NITRIDES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SATURATION (MATERIALS COMPOSITION); TITANIUM; ZIRCONIUM;

NUCLEAR REACTION ANALYSIS (NRA);

ION IMPLANTATION;

EID: 0031547835     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00003-7     Document Type: Article

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