Transformation of the semi-transparent into the metallic phase of zirconium nitride compounds by implantation at controlled temperature: The evolution of the optical properties

Journal of Optics A: Pure and Applied Optics

Volumn 2, Issue 5, 2000, Pages 442-448

  Camelio, S ^a   Girardeau, T ^a   Pichon, L ^a   Straboni, A ^a   Fayoux, C ^a   Guerin Ph ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COLORIMETRIC ANALYSIS; ELECTRIC PROPERTIES; ELLIPSOMETRY; ION BEAMS; ION IMPLANTATION; METALLIC FILMS; NITRIDES; OPTICAL FILMS; OPTICAL PROPERTIES; PHASE TRANSITIONS; SPUTTERING; THIN FILMS;

ION-BEAM SPUTTERING; NITROGEN STOICHIOMETRY;

ZIRCONIUM COMPOUNDS;

EID: 0034269289     PISSN: 14644258     EISSN: None     Source Type: Journal    
DOI: 10.1088/1464-4258/2/5/315     Document Type: Article

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