Extended microtunnels in GaN prepared by wet chemical etch

Applied Physics Letters

Volumn 89, Issue 20, 2006, Pages

  Huang, Hsin Hsiung ^a   Zeng, Hung Yu ^a   Lee, Chi Ling ^a   Lee, Shih Chang ^a   Lee, Wei I ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRONIC STRUCTURE; ETCHING; VAPOR PHASE EPITAXY;

EPITAXY TECHNIQUES; MICROTUNNELS; WET CHEMICAL ETCH;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 33751109461     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2374841     Document Type: Article

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