Smooth n-type GaN surfaces by photoenhanced wet etching

Applied Physics Letters

Volumn 72, Issue 5, 1998, Pages 560-562

  Youtsey, C ^a   Adesida, I ^a   Romano, L T ^b   Bulman, G ^c  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b PALO ALTO RESEARCH CENTER   (United States)

^c Research Triangle Park   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROCHEMISTRY; ETCHING; PHOTOCHEMICAL REACTIONS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; SURFACE TREATMENT;

GALLIUM NITRIDE; MERCURY ARC LAMP ILLUMINATION; PHOTOENHANCED WET ETCHING; POTASSIUM HYDROXIDE;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0032472665     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120758     Document Type: Article

References (13)

1. S. J. Pearton, C. R. Abernathy, F. Ren, J. R. Lothian, P. W. Wisk, and A. Katz, J. Vac. Sci. Technol. A 11, 1772 (1993).
2. J. R. Mileham, S. J. Pearton, C. R. Abernathy, J. D. MacKenzie, R. J. Shul, and S. P. Kilcoyne, J. Vac. Sci. Technol. A 14, 836 (1996).
3. I. Adesida, A. Mahajan, E. Andideh, M. A. Kahn, D. T. Olson, and J. N. Kuznia, Appl. Phys. Lett. 63, 2777 (1993).
4. R. J. Shul, G. B. McClellan, S. A. Casalnuovo, D. J. Rieger, S. J. Pearton, C. Constantine, C. Barratt, R. F. Karlicek, Jr., C. Tran, and M. Schurman, Appl. Phys. Lett. 69, 1119 (1996).
5. A. T. Ping, I. Adesida, and M. A. Khan, Appl. Phys. Lett. 67, 1250 (1995).
6. H. P. Gillis, D. A. Choutov, K. P. Martin, M. D. Bremser, and R. F. Davis, J. Electron. Mater. 26, 3 (1997).
7. M. S. Minsky, M. White, and E. L. Hu, Appl. Phys. Lett. 68, 1531 (1996).
8. H. Lu, Z. Wu, and I. Bhat, J. Electrochem. Soc. 144, L8 (1997).
9. C. Youtsey, I. Adesida, and G. Bulman, Electron. Lett. 33, 245 (1997).
10. C. Youtsey, I. Adesida, and G. Bulman, Appl. Phys. Lett. 71, 2151 (1997).
11. R. W. Haisty, J. Electrochem. Soc. 108, 790 (1961).
12. R. Khare and E. L. Hu, J. Electrochem. Soc. 138, 1516 (1991).
13. M. Ruberto, X. Zhang, R. Scarmozzino, A. E. Willner, D. V. Podlesnik, and R. M. Osgood, Jr., J. Electrochem. Soc. 138, 1174 (1991).