Deep proton writing: A rapid prototyping polymer micro-fabrication tool for micro-optical modules

New Journal of Physics

Volumn 8, Issue , 2006, Pages

  Debaes, C ^a   Van Erps, J ^a   Vervaeke, M ^a   Volckaerts, B ^a   Ottevaere, H ^a   Gomez, V ^a   Vynck, P ^a   Desmet, L ^a   Krajewski, R ^b   Ishii, Y ^a   Hermanne, A ^a   Thienpont, H ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); MICROMACHINING; MULTICHIP MODULES; NANOTECHNOLOGY; OPTICAL FIBER FABRICATION; OPTICAL INTERCONNECTS; PRINTED CIRCUIT BOARDS;

COMPLEX PHOTONIC SYSTEMS; DEEP PROTON WRITING (DPW); FIBER CONNECTORS; VRIJE UNIVERSITEIT BRUSSEL (VUB);

RAPID PROTOTYPING;

EID: 33751059205     PISSN: 13672630     EISSN: 13672630     Source Type: Journal    
DOI: 10.1088/1367-2630/8/11/270     Document Type: Article

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