Plastic microlens arrays by deep lithography with protons: Fabrication and characterization

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 8 B, 2004, Pages 5832-5839

  Ottevaere, Heidi ^a   Volckaerts, Bart ^a   Vervaeke, Michael ^a   Vynck, Pedro ^a   Hermanne, Alex ^a   Thienpont, Hugo ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

Author keywords

Deep lithography with protons; Fabrication; Interferometry; Microlens arrays; Microoptics; Optical characterization; Plastic refractive microlenses; Replication; Vapor diffusion

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ENERGY TRANSFER; INTERFEROMETERS; MICROOPTICS; OPTICAL FIBER FABRICATION; PRISMS; REFRACTIVE INDEX;

MICROLENS ARRAYS; OPTICAL CHARACTERIZATION; PLASTIC REFRACTIVE MICROLENSES; REPLICATION; VAPOR DIFFUSION;

MICROLENSES;

EID: 7544225561     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.5832     Document Type: Conference Paper

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