Prototyping micro-optical components with integrated out-of-plane coupling structures using Deep Lithography with Protons

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6185, Issue , 2006, Pages

  Van Erps, Jürgen ^a   Bogaert, Lawrence ^a   Volckaerts, Bart ^a   Debaes, Christof ^a   Thienpont, Hugo ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

Author keywords

Deep lithography with protons (DLP); Micro optics; Optical interconnect; Out of plane coupling; Passive optical splitters; Polymer multimode waveguides

Indexed keywords

IRRADIATION; LITHOGRAPHY; MICROOPTICS; MIRRORS; OPTICAL DEVICES; OPTICAL INTERCONNECTS; PRINTED CIRCUIT BOARDS; PROTONS; WAVEGUIDES;

DEEP LITHOGRAPHY WITH PROTONS (DLP); OUT-OF-PLANE COUPLING; PASSIVE OPTICAL SPLITTERS; POLYMER MULTIMODE WAVEGUIDES;

COUPLINGS;

EID: 33746776270     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.663372     Document Type: Conference Paper

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