Structure and mechanical properties of Ti–Si–C coatings deposited by magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 19, Issue 4, 2001, Pages 1912-1918

  Koutzaki, S H ^a   Krzanowski, J E ^a   Nainaparampril, J J ^b  

^a Univ of New Hampshire   (United States)

^b Curtiss Wright Controls Inc   (United States)

Author keywords

(Ti,Si)C

Indexed keywords

EID: 85011851941     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.1379322     Document Type: Conference Paper

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