Nanostructure and mechanical properties of WC-SiC thin films

Journal of Materials Research

Volumn 17, Issue 12, 2002, Pages 3163-3167

  Endrino, Jose L ^a   Krzanowski, James E ^a  

^a University of New Hampshire   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; CRYSTAL MICROSTRUCTURE; DENSIFICATION; HARDNESS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; POROSITY; SILICON CARBIDE; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN CARBIDE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DUAL RADIO FREQUENCY MAGNETRON SPUTTERING; NANOCRYSTALLINE STRUCTURE; POROUS STRUCTURE;

THIN FILMS;

EID: 0036968258     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2002.0457     Document Type: Article

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