Effect of rapid thermal annealing on the crystal quality and the piezoelectric response of polycrystalline AlN films

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 1814-1818

  Vergara, L ^a   Olivares, J ^a   Iborra, E ^a   Clement, M ^a   Sanz Hervas A ^a   Sangrador, J ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

aluminum nitride; piezoelectric effect; rapid thermal annealing; Sputtering; X ray diffraction

Indexed keywords

ALUMINUM NITRIDE; CRYSTALS; PIEZOELECTRICITY; RAPID THERMAL ANNEALING; SPUTTERING; X RAY DIFFRACTION;

CRYSTAL QUALITY; CRYSTALLITES; PIEZOELECTRIC EFFECTS; POLYCRYSTALLINE FILMS;

THIN FILMS;

EID: 33750830508     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.07.002     Document Type: Article

References (22)

1. Caliendo C., and Imperatori P. Appl. Phys. Lett. 83 (2003) 1641
2. Lanz R., and Muralt P. IEEE Trans. Ultrason. Ferroelect, Freq. Control 52 (2005) 936
3. Mishin S., Marx D.R., Sylvia B., Lughi V., Turner K.L., and Clarke D.R. Proceedings of IEEE 2003 International Ultrasonics Symposium, Honolulu, U.S.A., October 5-8 (2003) 2028
4. Qiao D., Guan Z.F., Carlton J., Lau S.S., and Sullivan G.J. Appl. Phys. Lett. 74 (1999) 2652
5. Oliveira J.C., Cavaleiro A., Vieira M.T., Bigot L., Garapon C., Mugnier J., and Jacquier B. Thin Solid Films 446 (2004) 264
6. Naik R.S., Lutsky J.J., Reif R., Sodini C.G., Becker A., Fetter L., Huggins H., Miller R., Pastalan J., Rittenhouse G., and Wong Y.-H. IEEE Trans. Ultrason. Ferroelect, Freq. Control 47 (2000) 292
7. Loebl H.P., Klee M., Metzmacher C., Brand W., Milsom R., and Lok P. Mater. Chem. Phys. 79 (2003) 143
8. Sanz-Hervás A., Clement M., Iborra E., Vergara L., Olivares J., and Sangrador J. Appl. Phys. Lett. 88 (2006) 161915
9. Shiosaki T., Adachi M., and Kawabata A. Thin Solid Films 96 (1982) 129
10. Beshkov B., Vassilev G.P., Elizalde M.R., and Gomez-Acebo T. Mater. Chem. Phys. 82 (2003) 452
11. Watanabe Y., Kitazawa N., Nakamura Y., Li C., Sekino T., and Niihara K. J. Vac. Sci. Technol., A 18 (2000) 1567
12. Clement M., Iborra E., Sangrador J., Sanz-Hervás A., Vergara L., and Aguilar M. J. Appl. Phys. 94 (2003) 1495
13. de Keijser Th.H., Mittemeijer E.J., and Rozendaal H.C.F. J. Appl. Crystallogr. 16 (1983) 309
14. Iborra E., Vergara L., Sangrador J., Clement M., Sanz-Hervás A., and Olivares J. Proceedings of IEEE International Ultrasonics, Ferroelectrics, and Frequency Control Joint 50th Anniversary Conference. Montréal, Canada, August 24-27 (2004) 1880
15. Harris J.H., Youngman R.A., and Teller R.G. J. Mater. Res. 5 (1990) 1763
16. Rodríguez-Navarro A., Otaño-Rivera W., García-Ruiz J.M., Messier R., and Pilione L.J. J. Mater. Res. 12 (1997) 1689
17. Davydov V.Yu., Kitaev Yu.E., Goncharuk I.N., Smirnov A.N., Graul J., Semchinova O., Uffmann D., Smirnov M.B., Mirgorodsky A.P., and Evarestov R.A. Phys. Rev. B 58 (1998) 12899
18. Prokofyeva T., Seon M., Vanbuskirk J., Holtz M., Nikishin S.A., Faleev N.N., Temkin H., and Zollner S. Phys. Rev. B 63 (2001) 125313/1
19. Sanz-Hervás A., Iborra E., Clement M., Sangrador J., and Aguilar M. Diamond Relat. Mater. 12 (2003) 1186
20. Paduano Q.S., Weyburne D.W., Jasinski J., and Liliental-Weber Z. J. Cryst. Growth 261 (2004) 259
21. Ruffner J.A., Clem P.G., Tuttle B.A., Dimos D., and Gonzales D.M. Thin Solid Films 354 (1999) 256
22. Hickernell F.S. Proceedings of IEEE 2002 International Ultrasonics Symposium. Munich, Germany, October 8-11 (2002) 231