A model for the accurate determination of the electromechanical coupling factor of thin film SAW devices on non-insulating substrates

Proceedings - IEEE Ultrasonics Symposium

Volumn 3, Issue , 2004, Pages 1880-1883

  Iborra, E ^a   Vergara, L ^a   Sangrador, J ^a   Clement, M ^a   Sanz Hervas A ^a   Olivares, J ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

Electrical model; Electromagnetic feedthrough; Non insulating substrate; Piezoelectric thin film; SAW

Indexed keywords

ELECTRICAL MODELS; ELECTROMAGNETIC FEEDTHROUGH; NON-INSULATING SUBSTRATES; PIEZOELECTRIC THIN FILMS;

COMPUTER SIMULATION; DEPOSITION; FREQUENCY RESPONSE; MATHEMATICAL MODELS; OXIDATION; SILICON; SUBSTRATES; THIN FILMS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 21644478266     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2004.1418197     Document Type: Conference Paper

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