Real-time x-ray studies of gallium adsorption and desorption

Journal of Applied Physics

Volumn 100, Issue 8, 2006, Pages

  Özcan, Ahmet S ^a,d   Wang, Yiyi ^a   Ozaydin, Gozde ^a,e   Ludwig, Karl F ^a   Bhattacharyya, Anirban ^b   Moustakas, Theodore D ^b   Siddons, D Peter ^c  

^a Boston University   (United States)

^b Boston University   (United States)

^c BROOKHAVEN NATIONAL LABORATORY   (United States)

^d IBM MICROELECTRONICS   (United States)

^e Mechanical and Aerospace Engineering Department

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM ADSORPTION; NANODROPLETS; NITROGEN PLASMA SOURCES; REAL TIME X RAY ANALYSIS;

ADSORPTION; DEPOSITION; DESORPTION; GALLIUM COMPOUNDS; NANOSTRUCTURED MATERIALS; X RAY ANALYSIS;

REAL TIME SYSTEMS;

EID: 33750499800     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2358307     Document Type: Article

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