Fabrication and characterization of sputtered titanium dioxide films

Applied Surface Science

Volumn 252, Issue 24, 2006, Pages 8651-8656

  Akl, A A ^a   Kamal, H ^b   Abdel Hady, K ^a  

^a Minia University ^*  (Egypt)

^b Ain Shams University   (Egypt)

Author keywords

Thin films and sputtering; Titanium oxide

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; SPUTTERING; TITANIUM DIOXIDE; TITANIUM OXIDES;

FILM THICKNESS; OPTICAL BAND GAP; OPTICAL CONSTANTS;

THIN FILMS;

EID: 33749124552     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.12.001     Document Type: Article

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