A rotary electrostatic micromotor 1 × 8 optical switch

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 5, Issue 1, 1999, Pages 26-32

  Azzam Yasseen, A ^a   Mitchell, Joseph N ^a   Klemic, James F ^b   Smith, David A ^a   Mehregany, Mehran ^a  

^a Case Western Reserve University   (United States)

^b CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

DRIE; Microactuators; Micromotors; Microoptics; MOEMS; Optical switches

Indexed keywords

CROSSTALK; ELECTRIC MOTORS; ELECTROSTATIC DEVICES; LENSES; LIGHT TRANSMISSION; MICROMACHINING; MICROOPTICS; MIRRORS; NICKEL; ROTATING MACHINERY; ROTORS (WINDINGS); SILICON;

MICROMOTORS;

OPTICAL SWITCHES;

EID: 0032678729     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748101     Document Type: Article

References (13)

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