Piezoelectrically pushed rotational micromirrors for wide-angle optical switch applications

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 263-266

  Kim, Sung Jin ^a   Cho, Young Ho ^a   Nam, Hyo Jin ^b   Bu, Jong Uk ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b LG Electronics Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; OPTICAL SWITCHES; PIEZOELECTRIC DEVICES;

MICROMIRRORS; PIEZOELECTRIC ACTUATORS; VOLTAGE-ANGLE ACTUATORS; WIDE-ANGLE OPTICAL CROSSCONNECT;

MIRRORS;

EID: 0038156067     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. H. Laor, "MEM Mirrors Application in Optical Cross-Connects," IEEE LEOS '98, Monterey, CA, 1998, pp. II/21-II/22.
2. H. Toshiyosh, W. Piyawattanametha, C.-T. Chan, and M. C. Wu, "Linearization of Electrostatically Actuated Surface Micromachined 2-D Optical Scanner," Journal of Microelectromechanical Systems, Vol.10, No.2, June, 2001, pp. 205-214.
3. V. Aksyuk, "LambdaRouter," Proc. IEEE Optical MEMS 2001, Invited Talk.
4. Y.J. Yee, J.U. Bu, M. Ha, J. Choi, H. Oh, S. Lee, and H. Nam, "Fabrication and Characterization of a PZT Actuated Micromirror with Two-axis Rotational Motion for Free Space Optics," Proc. IEEE MEMS Workshop 2001, pp. 317-320.
5. M. Ikeda, H. Totani, A. Akiba, H. Goto, M. Matsumoto, and T. Yada, "PZT Thins-Film Actuator Driven Micro Optical Scanning Sensor by 3D Integration of Optical and Mechanical Devices." Proc. IEEE MEMS Workshop 99, pp.435-440.
6. D.L. DeVoe and A.P. Pisano, "Modeling and Optimal Design of Piezoelectric Cantilever Actuators," Journal of Microelectromechanical Systems, Vol.6, No.3, Sept., 1997, pp.266-270.
7. M.-J. Kim and Y.-H. Cho, "Design, Fabrication and Characterization of Piezoelectric Multi-layer Cantilever Actuators for the Minimum Initial Deflection," Proc. 10th Int. Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, 1999, pp.1758-1761.