Electromagnetic 2 × 2 MEMS optical switch

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 10, Issue 3, 2004, Pages 545-550

  Ji, Chang Hyeon ^a   Yee, Youngjoo ^a   Choi, Junghoon ^a   Kim, Seong Hyok ^a   Bu, Jong Uk ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

Electromagnetic actuation; Micromirror; Optical switch

Indexed keywords

ACTUATORS; ELECTRIC CURRENTS; ELECTROPLATING; FINITE ELEMENT METHOD; FLIP FLOP CIRCUITS; MAGNETIC FIELDS; MAGNETIZATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSTRUCTURE; MIRRORS; SCANNING ELECTRON MICROSCOPY; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

ELECTROMAGNETIC ACTUATION; ELECTROMAGNETIC FORCE; LINEAR ACTUATION; MICROMIRRORS;

OPTICAL SWITCHES;

EID: 4344627289     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.829199     Document Type: Article

References (8)

1. C. Marxer and N. F. de Rooij, "Micro-opto-mechanical 2 × 2 switch for single-mode fibers based on plasma-etched silicon mirror and electro-static actuation," J. Lightwave Technol., vol. 17, pp. 2-6, Jan. 1999.
2. L. Dellmann, W. Noell, C. Marxer, K. Weible, M. Hoffmann, and N. F. de Rooij, "4 × 4 matrix switch based on MEMS switches and integrated waveguides," in Transducers '01, pp. 1332-1335.
3. J. W. Judy and R. S. Muller, "Magnetically actuated, addressable microstructures," J. Microelectromech. Syst., vol. 6, pp. 249-256, Sept. 1997.
4. R. A. Miller, G. W. Burr, Y. C. Tai, D. Psaltis, C. M. Ho, and R. Katti, "Electromagnetic MEMS scanning mirrors for holographic data storage," in Tech. Dig. Solid-State Sensor and Actuator Workshop, 1996, pp. 183-186.
5. B. Behin, K. Y. Lau, and R. S. Muller, "Magnetically actuated micromirrors for fiber-optic switching," in Tech. Dig. Solid-State Sensor and Actuator Workshop, 1998, pp. 273-276.
6. H. Toshiyoshi, D. Miyauchi, and H. Fujita, "Electromagnetic torsion mirrors for self-aligned fiber-optic crossconnectors by silicon micromachining," J. Select. Topics Quantum Electron., vol. 5, no. Jan.-Feb., pp. 10-17, 1999.
7. C.-H. Ji and Y.-K. Kim, "Electromagnetic micromirror array with single-crystal silicon mirror plate and aluminum spring," J. Lightwave Technol., vol. 21, pp. 584-590, Mar. 2003.
8. C.-H. Ji, Y. Yee, J. Choi, and J.-U. Bu, "Electromagnetic variable optical attenuator," in Proc. Optical MEMS '02, pp. 49-50.