Improvement in proton beam writing at the nano scale

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 673-676

  Van Kan, J A ^a   Bettiol, A A ^a   Ansari, K ^a   Shao, P ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTROMAGNETISM; ELECTRON BEAMS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY;

ELECTROSTATIC SCANNING; MAGNETIC SCANNING SYSTEMS; RASTER SCANNING; SPIRAL SCANNING ALGORITHMS;

MICROELECTRONICS;

EID: 3042699916     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. J.A. van Kan, A.A. Bettiol and F. Watt, "Three-Dimensional Nanolithography using proton beam writing", APL 83, 1629-1631 (2003).
2. G.Chin, Science, "Highlights of the recent Literature", 301, 1291-1292 (2003).
3. T.C. Sum, A.A. Bettiol, J.A. van Kan, F. Watt, E.Y.B. Pun and K.K. Tung, "Proton beam writing of lowloss polymer wave guides", APL 83, 1707-1709 (2003).
4. F. Watt, J.A. van Kan and T. Osipowicz, "Three-Dimensional Microfabrication Using Maskless Irradiation with MeV Ion Beams: Proton beam micromachining" MRS Bulletin 25, 33 (2000).
5. M.P.R. Waligorski, R.N. Hamm and R. Katz, Nucl. Tracks Radiat. Meas. 11, 309 (1986).
6. A.A. Bettiol, J.A. van Kan, T.C. Sum and F. Watt, F. "A LabVIEW-based scanning and control system for proton beam micromachining", Nucl. Instr. & Meth., B181 49-53 (2001).
7. A.L. Bogdanov and S.S. Peredkov, http://www.maxlab.lu.se/beamlines/bld811
8. F. Watt, LA. van Kan, I. Rajta, A.A. Bettiol, T.F. Choo, M.B.H. Breese and T. Osipowicz, "The National University of Singapore high energy ion nano-probe facility: Performance tests", Nucl. Instr. and Meth. B210 14-20 (2003).