SCOPUS 정보 검색 플랫폼

Volumn 65, Issue 3-4, 2002, Pages 319-326

Analysis of optical emission spectra from ICP of Ar-SiH4-CH4 system

Author keywords

Abel inversion; Boltzmann plot; Chemical species; Excitation temperature; Gas temperature; Inductively coupled plasma; Optical emission spectroscopy; Plasma CVD

Indexed keywords

EMISSION SPECTROSCOPY; LIGHT EMISSION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA TORCHES; SPECTRUM ANALYSIS; TERNARY SYSTEMS; THERMAL EFFECTS;

OPTICAL EMISSION SPECTROSCOPY;

INDUCTIVELY COUPLED PLASMA;

EID: 0037182055 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/S0042-207X(01)00437-7 Document Type: Conference Paper

Times cited : (11)

References (19)

1
- 0000626632
- (1990) J Am Ceram Soc , vol.73 , pp. 3356-3362
- Lee, H.J.¹

2
- 0032101589
- (1998) J Aerosol Sci , vol.29 , pp. 675-686
- Sugasawa, M.¹

3
- 0001737278
- (1987) Appl Phys Lett , vol.51 , pp. 737-739
- Matsumoto, S.¹

4
- 0024776695
- in Japanese
- (1988) J Ceram Soc Jpn , vol.97 , pp. 49-55
- Murakami, H.¹

5
- 0006193421
- in Japanese
- (1988) J Ceram Soc Jpn , vol.22 , pp. 317-322
- Pan, W.X.¹

6
- 0006139751
- in Japanese
- (1995) J High Temp Soc , vol.21 , pp. 61-68
- Sugasawa, M.¹

7
- 0024751406
- (1989) J Phys D , vol.22 , pp. 1471-1477
- Gravelle, D.V.¹

8
- 0029517724
- (1995) J Phys D , vol.28 , pp. 2600-2606
- Michelt, B.¹

9
- 0022203376
- in Japanese
- (1985) J Ceram Soc Jpn , vol.93 , pp. 511-516
- Kijima, K.¹

10
- 85011151702
- Tokyo, Japan: Kodansha Scientific, in Japanese
- (1986) Principles and applications of ICP spectroscopic analysis , pp. 20
- Haraguchi, H.¹

11
- 0003527573
- New York: IFI/Plenum
- (1969) Tables of spectral lines of neutral and ionized atoms
- Stringanov, A.R.¹

12
- 25944454463
- Tokyo, Japan: Shinzansha, in Japanese
- (1996) Principles and applications of thermal plasma materials processing , pp. 154-157
- Ushio, M.¹

13
- 0000106731
- (1989) Phys Rev A , vol.39 , pp. 2461-2471
- Wiese, W.L.¹

14
- 0006241293
- Tokyo, Japan: Gakkai Shuppan Center, in Japanese
- (1995) Spectroscopic measurement of plasma
- Yamamoto, M.¹

15
- 0000444482
- (1960) J Opt Soc Am , vol.50 , pp. 826-830
- Freeman, M.P.¹

16
- 0003588966
- New York: van Nostrand Company
- (1989) Molecular spectra and molecular structure I. Spectra of diatomic molecules
- Helzbelg, G.¹

17
- 0006181286
- Tokyo
- (1987) Proceedings of the Eighth International Symposium on Plasma Chemistry , pp. 385-390
- Nakanaga, T.¹

18
- 0000069369
- (1992) J Chem Phys , vol.97 , pp. 8389-8406
- Grev, R.S.¹

19
- 0016935187
- (1976) IEEE Trans Plasma Sci , vol.PS-4 , pp. 28-39
- Boulos, M.I.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.