Laser interference as a lithographic nanopatterning tool

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 1, 2006, Pages

  Van Rijn, Cees J M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Fabrication; Laser interference; Lasers; Lithography; Nanopatterning

Indexed keywords

FABRICATION; ION BEAM LITHOGRAPHY; LASER APPLICATIONS; LASER BEAMS;

LASER INTERFERENCE LITHOGRAPHY; MICROSIEVES; NANOPATTERNING; STRUCTURE SIZE;

NANOTECHNOLOGY;

EID: 33748519541     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2173269     Document Type: Article

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