Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography

Advanced Materials

Volumn 13, Issue 20, 2001, Pages 1551-1554

  Vogelaar, L ^a   Nijdam, W ^a   Van Wolferen, H A G M ^b   De Ridder, R M ^b   Segerink, F B ^a   Fluck E ^a   Kuipers, L ^b   Van Hulst, N F ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b AQUAMARIJN MICRO FILTRATION B V   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; ION BEAMS; LASER APPLICATIONS; LIGHT; LIGHT SCATTERING; OXIDATION; REACTIVE ION ETCHING; REFRACTIVE INDEX; SILICON WAFERS;

BANDGAP; FOCUSED ION BEAM ASSISTED LASER INTERFERENCE LITHOGRAPHY; PHOTONIC CRYSTAL SLABS; WAVEGUIDING DEFECT STRUCTURES;

THIN FILMS;

EID: 0035899955     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V     Document Type: Article

References (13)