Microsieves made with laser interference lithography for micro-filtration applications

Journal of Micromechanics and Microengineering

Volumn 9, Issue 2, 1999, Pages 170-172

  Van Rijn, Cees J M ^a   Nijdam, Wietze ^a   Kuiper, Stein ^a   Veldhuis, Gert J ^a   Van Wolferen, Henk ^a   Elwenspoek, Miko ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROFILTRATION; MICROMACHINING; PHOTOLITHOGRAPHY; SIEVES; SILICON NITRIDE; SILICON WAFERS;

CLEAN WATER FLUX; LASER INTERFERENCE LITHOGRAPHY; SILICON NITRIDE MEMBRANE;

MICROELECTROMECHANICAL DEVICES;

EID: 0033138330     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/2/316     Document Type: Article

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