Robust nonlinear feedback-feedforward control of a coupled kinetic Monte Carlo-finite difference simulation

Proceedings of the American Control Conference

Volumn 4, Issue , 2005, Pages 2548-2553

  Rusli, E ^b   Drews, T O ^b   Ma, D L ^b   Alkire, R C ^b   Braatz, R D ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL EQUIPMENT; CURRENT DENSITY; ELECTRODEPOSITION; FEEDBACK; FINITE DIFFERENCE METHOD; MONTE CARLO METHODS; OPTICAL INTERCONNECTS; ROBUSTNESS (CONTROL SYSTEMS);

COPPER INTERCONNECTS; FEEDFORWARD-FEEDBACK CONTROLLERS; KINETIC MONTE CARLO (KMC); STOCHASTIC VARIATION;

NONLINEAR CONTROL SYSTEMS;

EID: 23944524429     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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