Effect of amorphization and carbon co-doping on activation and diffusion of boron in silicon

Applied Physics Letters

Volumn 89, Issue 6, 2006, Pages

  Pawlak, B J ^a   Janssens, T ^b   Brijs, B ^b   Vandervorst, W ^b   Collart, E J H ^c   Felch, S B ^d   Cowern, N E B ^e  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b IMEC   (Belgium)

^c Applied Implant Technologies   (United Kingdom)

^d APPLIED MATERIALS INC   (United States)

^e UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION PROPERTIES; B DIFFUSION; CO-DOPING; JUNCTION DEPTH;

ACTIVATION ANALYSIS; AMORPHIZATION; BORON; CARBON; CRYSTALLIZATION; DIFFUSION; RAPID THERMAL ANNEALING; SEMICONDUCTOR DOPING;

SEMICONDUCTING SILICON;

EID: 33747102413     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2227863     Document Type: Article

References (14)

1. N. E. B. Cowern, B. Colombeau, J. Benson, A. J. Smith, W. Lerch, S. Paul, T. Graf, F. Cristiano, X. Hebras, and D. Bolze, Appl. Phys. Lett. 86, 101905 (2005).
2. S. Ruffell, I. V. Mitchell, and P. J. Simpson, J. Appl. Phys. 97, 123518 (2005).
3. R. Duffy, V. C. Venezia, J. Loo, M. J. P. Hopstaken, M. A. Verheijen, J. G. M. van Berkum, G. C. J. Maas, Y. Tamminga, T. Dao, and C. Demeurisse, Appl. Phys. Lett. 86, 081917 (2005).
4. N. E. B. Cowern, G. Mannino, P. A. Stolk, F. Roozeboom, H. G. A. Huizing, J. G. M. van Berkum, F. Cristiano, A. Claverie, and M. Jaraíz, Phys. Rev. Lett. 82, 4460 (1999).
5. Maria Aboy, Lourdes Pelaz, Luis A. Marqués, Pedro López, Juan Barbolla, R. Duffy, V. C. Venezia, and Peter B. Griffin, Appl. Phys. Lett. 86, 031908 (2005).
6. B. J. Pawlak, W. Vandervorst, A. J. Smith, N. E. B. Cowern, B. Colombeau, and X. Pages, Appl. Phys. Lett. 86, 101913 (2005).
7. B. J. Pawlak, R. Surdeanu, B. Colombeau, A. J. Smith, N. E. B. Cowern, R. Lindsay, W. Vandervorst, B. Brijs, O. Richard, and F. Cristiano, Appl. Phys. Lett. 84, 2055 (2004).
8. E. Napolitani, A. Coati, D. De Salvador, A. Camera, S. Mirabella, S. Scalese, and F. Priolo, Appl. Phys. Lett. 79, 4145 (2001).
9. "Victor Moroz, Yong-Seog Oh, Dipu Pramanik, Houda Graoui, and Majeed A. Foad, Appl. Phys. Lett. 87, 051908 (2005).
10. R. Duffy, V. C. Venezia, A. Heringa, B. J. Pawlak, M. J. P. Hopstaken, G. C. J. Maas, Y. Tamminga, T. Dao, F. Roozeboom, and L. Pelaz, Appl. Phys. Lett. 84, 4283 (2004).
11. V. C. Venezia, R. Duffy, L. Pelaz, M. J. P. Hopstaken, G. C. J. Maas, T. Dao, Y. Tamminga, and P. Graat, Mater. Sci. Eng., B 124, 245 (2005).
12. J. A. Roth, G. L. Olson, D. C. Jacobson, and J. M. Poate, Appl. Phys. Lett. 57, 1340 (1990).
13. S. Mirabella, A. Coati, D. De Salvador, E. Napolitani, A. Mattoni, G. Bisognin, M. Berti, A. Carnera, A. V. Drigo, S. Scalese, S. Pulvirenti, A. Terrasi, and F. Priolo, Phys. Rev. B 65, 045209 (2002).
14. ASTM, Report No. F723-88, 1 (1988).