Study on nano-machining process using mechanism of a friction force microscope

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing

Volumn 44, Issue 1, 2001, Pages 244-253

  Ashida, Kiwamu ^a   Morita, Noboru ^b   Yoshida, Yoshitaro ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b CHIBA UNIVERSITY   (Japan)

Author keywords

AFM; Cutting chip; Cutting force measurement; FFM; Micro cantilever for processing; Nano machining process; Single crystal silicon; Single point cutting; Wear of cutting edge

Indexed keywords

CANTILEVER BEAMS; FORCE MEASUREMENT; MATHEMATICAL MODELS; MICROSCOPIC EXAMINATION; NANOTECHNOLOGY; WEAR OF MATERIALS;

FRICTION FORCE MICROSCOPES (FFM); NANOMACHINING;

MACHINING;

CUTTING; FRICTION; MACHINING;

EID: 0034837107     PISSN: 13447653     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmec.44.244     Document Type: Article

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