Microfabricated dynamic scanning force microscope using a three dimensional piezoelectric T-shape actuator

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 B, 1999, Pages 7180-7184

  Chu, Jiaru ^a,c   Maeda, Ryutaro ^a   Itoh, Toshihiro ^b   Kataoka, Kenichi ^b   Suga, Tadatomo ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c R and D Institute for Photonics Engineering   (Japan)

Author keywords

Actuator; MEMS; Micro force sensor; Micro DSFM; Microfabrication; Piezoelectric material

Indexed keywords

LEAD COMPOUNDS; MICROACTUATORS; MICROELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROSCOPIC EXAMINATION; MICROSENSORS; PIEZOELECTRIC TRANSDUCERS; SENSITIVITY ANALYSIS;

DYNAMIC SCANNING FORCE MICROSCOPY; SELF-EXCITING PIEZOELECTRIC FORCE SENSORS;

NANOTECHNOLOGY;

EID: 0033333198     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.7180     Document Type: Article

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