Mechanical properties and size effects of single crystal silicon

Chinese Journal of Mechanical Engineering (English Edition)

Volumn 19, Issue 2, 2006, Pages 290-293

  Han, Guangping ^a   Liu, Kai ^a   Wang, Xiuhong ^b  

^a XI'AN UNIVERSITY OF TECHNOLOGY   (China)

^b ZHENGZHOU INSTITUTE OF AERONAUTICAL INDUSTRY MANAGEMENT   (China)

Author keywords

Bending test; Elastic modulus; Mechanical properties; Nano indentation; Size effect

Indexed keywords

BENDING STRENGTH; ELASTIC MODULI; HARDNESS; INDENTATION; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; PLASTICITY; SINGLE CRYSTALS;

BENDING TEST; NANOINDENTATION; SINGLE CRYSTAL SILICON; SIZE EFFECT;

SILICON;

EID: 33746548481     PISSN: 10009345     EISSN: None     Source Type: Journal    
DOI: 10.3901/cjme.2006.02.290     Document Type: Article

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