Analytical model and applications of size effect in MEMS

Zhongguo Jixie Gongcheng/China Mechanical Engineering

Volumn 15, Issue 7, 2004, Pages 632-

  Han, Guangping ^a   Liu, Kai ^a   Chu, Jinkui ^a  

^a NONE

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EID: 2942655091     PISSN: 1004132X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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