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Volumn 91, Issue 1-4, 2002, Pages 111-118
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Mechanical property measurements of nanoscale structures using an atomic force microscope
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Author keywords
Atomic force microscope (AFM); Bending strength; Elastic modulus; Nanomechanics; Silicon
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Indexed keywords
ANISOTROPY;
BEAMS AND GIRDERS;
BENDING STRENGTH;
CRACK INITIATION;
ELASTIC MODULI;
ETCHING;
FRACTURE;
NANOSTRUCTURED MATERIALS;
SILICA;
SINGLE CRYSTALS;
THERMOOXIDATION;
NANOSCALE STRUCTURES;
ATOMIC FORCE MICROSCOPY;
SILICON;
SILICON DIOXIDE;
ANISOTROPY;
ARTICLE;
ATOMIC FORCE MICROSCOPY;
BULK DENSITY;
CALCULATION;
CRYSTAL;
CRYSTAL STRUCTURE;
STRENGTH;
THEORY;
YOUNG MODULUS;
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EID: 0036329379
PISSN: 03043991
EISSN: None
Source Type: Journal
DOI: 10.1016/S0304-3991(02)00089-X Document Type: Article |
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Times cited : (89)
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References (19)
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