Mechanical properties and scaling effects in micro-electro-mechanical systems

Jixie Qiangdu/Journal of Mechanical Strength

Volumn 23, Issue 4, 2001, Pages 373-379

  Mei, Tao ^a   Kong, Deyi ^a   Zhang, Peiqiang ^a   Wu, Xiaoping ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Micro electro mechanical system; Microactuator; Micromachine; Microrobot; Silicon material; Size effect

Indexed keywords

EID: 0035697640     PISSN: 10019669     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)