Design-based metrology: Advanced automation for CD-SEM recipe generation

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue II, 2005, Pages 527-535

  Tabery, C ^a   Capodieci, L ^a   Haidinyak, C ^a   Shah, K ^a   Threefoot, M ^a   Choo, B ^a   Singh, B ^a   Nehmadi, Y ^b   Ofek, C ^b   Menadeva, O ^b   Ben Porath, A ^b  

^a ADVANCED MICRO DEVICES   (United States)

^b Applied Materials Inc Israel   (Israel)

Author keywords

CAD; CD SEM; Design based manufacturing; Design based metrology; DFM; Metrology Request; OPC model calibration; RET; SEM Automation

Indexed keywords

DESIGN FOR MANUFACTURABILITY (DFM); DESIGN-BASED METROLOGY (DBM); OPTICAL RULE CHECKS (ORC); RESOLUTION ENHANCE TECHNIQUE (RET);

AUTOMATION; COMPUTATIONAL COMPLEXITY; COMPUTER AIDED SOFTWARE ENGINEERING; DATA FLOW ANALYSIS; DATA PROCESSING; DATA TRANSFER; ERROR ANALYSIS; INTERFACES (COMPUTER); LITHOGRAPHY; MICROPROCESSOR CHIPS; SCANNING ELECTRON MICROSCOPY;

MEASUREMENT THEORY;

EID: 24644485285     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.601143     Document Type: Conference Paper

References (6)

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