Characteristics of accuracy for CD metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue I, 1999, Pages 291-308

  Banke, Bill ^a   Archie, Chas ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; PRECISION ENGINEERING; REGRESSION ANALYSIS; SCANNING ELECTRON MICROSCOPY;

CRITICAL DIMENSION-SCANNING ELECTRON MICROSCOPES (CD-SEM);

PHOTOLITHOGRAPHY;

EID: 0032675468     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (18)