Issues in line edge and linewidth roughness metrology

AIP Conference Proceedings

Volumn 788, Issue , 2005, Pages 386-393

  Villarrubia, J S ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Line edge roughness (LER); Linewidth roughness (LWR); Measurement algorithms; Measurement bias

Indexed keywords

EID: 33745600950     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2062992     Document Type: Conference Paper

References (15)

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12. Daniel J. C. Herr (private communication) called this to my attention.
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14. J. S. Villarrubia and B. D. Bunday, "Unbiased Estimation of Linewidth Roughness," Proc. SPIE 5752 (2005), in press.
15. W. H. Press, B. P. Flannery, S. A. Teukolsky, and W. T. Vetterling, Numerical Recipes in C, (Cambridge University Press, Cambridge, 1988) p. 520.