Laser assisted and wet chemical etching of silicon nanostructures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 1474-1479

  Kolasinski, Kurt W ^a   Mills, David ^b   Nahidi, Mona ^b  

^a UNIVERSITY OF VIRGINIA   (United States)

^b QUEEN MARY UNIVERSITY OF LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

LASER ASSISTED ETCHING; NANOCRYSTALLINE STRUCTURE; SIZE DISTRIBUTION;

ETCHING; LASER ABLATION; LASER APPLICATIONS; LASER BEAM EFFECTS; PHOTOLUMINESCENCE; POROUS SILICON;

NANOSTRUCTURED MATERIALS;

EID: 33745514847     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2188414     Document Type: Article

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