Growth of fluorocarbon macromolecules in the gas phase: II. The growth mechanisms of large positive ions observed in the downstream region of Ar/CF4 plasmas

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 6 A, 2006, Pages 5219-5231

  Furuya, Kenji ^a   Yuktta, Shinobu ^a   Harata, Akira ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

CF4 plasma; Growth mechanism; Large positive ion; Mass analysis

Indexed keywords

GASES; IONIZATION; MACROMOLECULES; PLASMAS; POSITIVE IONS;

ELECTRONEGATIVE PLASMA; GROWTH MECHANISM; LARGE POSITIVE ION; MASS ANALYSIS;

FLUOROCARBONS;

EID: 33745255676     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.5219     Document Type: Article

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