Growth of fluorocarbon macromolecules in a gas phase (I). Mass spectrometric investigation of products in the downstream region of Ar/CF 4 plasmas

Chemistry Letters

Volumn 34, Issue 2, 2005, Pages 224-225

  Furuya, Kenji ^a   Yukita, Shinobu ^a   Okumura, Hiroshi ^a   Harata, Akira ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; FLUOROCARBON;

ARTICLE; GAS ANALYSIS; IONIZATION; MASS SPECTROMETRY; MOLECULAR DYNAMICS; MOLECULAR MECHANICS; PHASE TRANSITION; PLASMA; PRESSURE GRADIENT;

EID: 17844369950     PISSN: 03667022     EISSN: None     Source Type: Journal    
DOI: 10.1246/cl.2005.224     Document Type: Article

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