Structural analysis of cubic boron nitride films by ultraviolet Raman spectroscopy

Applied Physics Letters

Volumn 88, Issue 24, 2006, Pages

  Leung, K M ^a   Li, H Q ^a,c   Zou, Y S ^a   Ma, K L ^a   Chong, Y M ^a   Ye, Q ^a   Zhang, W J ^a   Lee, S T ^a   Bello, I ^b  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b UNIVERSITY OF WESTERN ONTARIO   (Canada)

^c HEFEI UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PHYSICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SENSITIVITY ANALYSIS; STRUCTURAL ANALYSIS; ULTRAVIOLET RADIATION;

CUBIC BORON NITRIDE FILMS; FILM THICKNESS; PHASE PURITY; UV RAMAN;

THIN FILMS;

EID: 33745219407     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2207994     Document Type: Article

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