Multichannel ellipsometry from 1.5 to 6.5 eV for real time characterization of wide band gap materials: Phase identification in boron nitride thin films

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1304-1310

  Zapien, J A ^a   Messier, R ^a   Collins, R W ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Boron nitride thin films; Ellipsometry; Real time characterization; Wide bandgap materials

Indexed keywords

BORON; CRYSTALLINE MATERIALS; ELLIPSOMETRY; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; NITRIDES; SPUTTER DEPOSITION; ULTRAVIOLET RADIATION;

SUBSTRATE BIASING;

THIN FILMS;

BORON NITRIDE;

EID: 0035269358     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00600-2     Document Type: Article

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