Real-time gray-scale photolithography for fabrication of continuous microstructure

Optics Letters

Volumn 27, Issue 19, 2002, Pages 1720-1722

  Peng, Qinjun ^a   Guo, Yongkang ^a   Liu, Shijie ^a   Cui, Zheng ^a  

^a SICHUAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ETCHING; FABRICATION; IMAGING TECHNIQUES; LIQUID CRYSTAL DISPLAYS; MASKS; MICROLENSES; MICROSTRUCTURE; OPTICAL COMMUNICATION; SILVER COMPOUNDS;

GRAY-SCALE PHOTOLITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0036800781     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.27.001720     Document Type: Article

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