Micro hot embossing for replication of microstructures

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 6 B, 2003, Pages 3859-3862

  Shan, Xue Chuan ^a,b   Maeda, Ryutaro ^a   Murakoshi, Yoichi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Hot emboss; MEMS; Microstructure; Mold; Polycarbonate; Replication

Indexed keywords

LENSES; MICROSTRUCTURE; MIRRORS; OPTICAL FIBERS; POLYCARBONATES;

HOT EMBOSSING;

MICROELECTROMECHANICAL DEVICES;

EID: 0042363340     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.3859     Document Type: Conference Paper

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