Microlens array produced using hot embossing process

Microelectronic Engineering

Volumn 60, Issue 3-4, 2002, Pages 365-379

  Ong, N S ^a   Koh, Y H ^a   Fu, Y Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Focused ion beam; Hot embossing; Microlens array

Indexed keywords

ION BEAMS; POLYCARBONATES; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON;

HOT EMBOSSING;

MICROLENSES;

EID: 0036532387     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00695-5     Document Type: Article

References (14)

1. Compact self-aligning assemblies with refractive microlens arrays made by contactless embossing
2. Microlens arrays
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4. Influence analysis of dwell time on focused ion beam micromachining in silicon
5. Microfabrication of microlens array by focused ion beam technology
6. Microfabrication of diffractive optical element with continuous relief by focused ion beam
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8. Flow behaviour of thin polymer films used for hot embossing lithography
9. Hot embossing in polymers as a direct way to pattern resist
10. Silicon as tool material for polymer hot embossing
11. Cylindrical plastic lens array fabricated by micro intrusion process
12. Hot embossing as a method for fabrication of polymer high aspect ratio structures
13. Realization of fabrication microlens array in mass production