Replication of microlens arrays by injection molding

Microsystem Technologies

Volumn 10, Issue 6-7, 2004, Pages 531-535

  Lee, B K ^a   Kim, D S ^a   Kwon, T H ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSION MOLDING; ELECTROPLATING; INJECTION MOLDING; IRRADIATION; POLYMERS; X RAYS;

MICROLENS ARRAYS; MOLD INSERTS; THERMAL CYCLES;

MICROLENSES;

EID: 10044228644     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0387-2     Document Type: Conference Paper

References (8)

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3. Beinhorn F; Ihlemann J; Luther K; Troe J (1999) Micro-lens arrays generated by UV laser irradiation of doped PMMA. Appl Phys A68: 709-713
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6. Lee S-K; Lee K-C; Lee SS (2002) A simple method for microlens fabrication by the modified LIGA process. J Micromech Microeng 12: 334-340
7. Kim DS; Yang SS; Lee S-K; Kwon TH; Lee SS (2003) Physical modeling and analysis of microlens formation fabricated by a modified LIGA process. J Micromech Microeng 13: 523-531
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