Noise analysis in parametric resonance based mass sensing

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2004, Pages 363-367

  Zhang, Wenhua ^a   Turner, Kimberly L ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE MEASUREMENT; FREQUENCIES; HARMONIC ANALYSIS; LINEAR EQUATIONS; REMOTE SENSING; SENSITIVITY ANALYSIS; TEMPERATURE CONTROL;

MASS SENSING; MASS SENSOR; NOISE ANALYSIS; PARAMETRIC RESONANCE;

RESONANCE;

EID: 21644477802     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-61412     Document Type: Conference Paper

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