Synthesis of Ti-Cr-N thin films by reactive ion-beam mixing of Ti/Cr interfaces

Surface Science

Volumn 600, Issue 11, 2006, Pages 2385-2391

  Palacio, C ^a   Arranz, A ^a  

^a C XII   (Spain)

Author keywords

Coatings; Compound formation; Ion implantation; Ion solid interactions; Nitrides; X ray photoelectron spectroscopy

Indexed keywords

CHROMIUM; INORGANIC COATINGS; INTERFACES (MATERIALS); ION BEAM ASSISTED DEPOSITION; ION IMPLANTATION; MONTE CARLO METHODS; NITRIDES; NITROGEN; SYNTHESIS (CHEMICAL); THIN FILMS; TITANIUM; X RAY PHOTOELECTRON SPECTROSCOPY;

COMPOUND FORMATION; ION-SOLID INTERACTIONS; NITRURATION; RATE CONTROLLING MECHANISMS; RESIDUAL DEFECTS;

METALLIC FILMS;

EID: 33646909934     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.03.043     Document Type: Article

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