Xenon irradiation of Ni3N/Si bilayers: Surface roughening and interface mixing and reactions

Physical Review B - Condensed Matter and Materials Physics

Volumn 63, Issue 15, 2001, Pages

  Rissanen, Leena ^a   Dhar, Sankar ^a   Lieb, Klaus Peter ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

NICKEL; NITROGEN; SILICON; XENON;

ARTICLE; HEAVY ION RADIATION; IRRADIATION; SURFACE PROPERTY; X RAY DIFFRACTION;

EID: 0034900057     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.63.155411     Document Type: Article

References (23)

1. A. Polman: J. Appl. Phys., 82, 1 (1997).
2. C. A. Straede: Nucl. Instrum. Methods Phys. Res. B, 113, 161 (1996).
3. W. Bolse: Mater. Sci. Eng., R., 12, 53 (1994)
4. W. Bolse: Mater. Sci. Eng., A, A253, 194 (1998).
5. J. Desimoni and A. Traverse: Phys. Rev. B, 48, 13 266 (1993).
6. S. Dhar, Y. N. Mohapatra, and V. N. Kulkarni: Phys. Rev. B, 54, 5769 (1996).
7. M. Nastasi and J. W. Mayer: Mater. Sci. Eng., R., 12, 1 (1994).
8. Y. T. Cheng: Mater. Sci. Rep., 5, 45 (1990).
9. P. Sigmund and A. Gras-Marti: Nucl. Instrum. Methods, 182/183, 25 (1981).
10. G. S. Was: Prog. Surf. Sci., 32, 211 (1990).
11. B. X. Liu: Phys. Status Solidi A, 94, 11 (1986).
12. T. Corts, A. Traverse, and W. Bolse: Nucl. Instrum. Methods Phys. Res. B, 80/81, 167 (1993).
13. T. Weber and K. P. Lieb: J. Appl. Phys., 73, 3499 (1993).
14. M. Milosavljevic, T. Corts, K. P. Lieb, and N. Bibic: Nucl. Instrum. Methods Phys. Res. B, 68, 426 (1992).
15. L. Rissanen, S. Dhar, K. P. Lieb, K. Engel, and M. Wenderoth: Nucl. Instrum. Methods Phys. Res. B, 161-163, 990 (2000).
16. T. Kacsich, M. Niederdrenk, P. Schaaf, K. P. Lieb, U. Geyer, and O. Schulte: Surf. Coat. Technol., 93, 32 (1997).
17. K. P. Lieb: Contemp. Phys., 40, 385 (1999).
18. M. Uhrmacher, K. Pampus, F. J. Bergmeister, D. Purschke, and K. P. Lieb: Nucl. Instrum. Methods Phys. Res. B, 9, 234 (1985).
19. J. F. Ziegeler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon Press, New York, 1985).
20. R. L. Doolittle: Nucl. Instrum. Methods Phys. Res. B, 15, 227 (1986).
21. Th. Osipowicz, K. P. Lieb, and S. Brüssermann: Nucl. Instrum. Methods Phys. Res. B, 18, 232 (1987).
22. J. Sachze: Z. Anorg. Allg. Chem., 251, 201 (1943).
23. S. Dhar, L. Rissanen, K. P. Lieb, K. Engel, and M. Wenderoth, Nucl. Instrum. Methods Phys. Res. B (to be published).