Formation and characterization of multiphase film properties of (Ti-Cr)N formed by cathodic arc deposition

Thin Solid Films

Volumn 333, Issue 1-2, 1998, Pages 88-94

  Nainaparampil, J J ^a   Zabinski, J S ^a   Korenyi Both, A ^b  

^a WRIGHT PATTERSON AIR FORCE BASE   (United States)

^b Hohman Plating and Mfg Inc   (United States)

Author keywords

Coatings; Titanium nitride; Tribology

Indexed keywords

CERAMIC COATINGS; CHROMIUM COMPOUNDS; SPUTTERING; TITANIUM NITRIDE; TRIBOLOGY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHROMIUM NITRIDE; MULTIPHASE FILMS;

THIN FILMS;

EID: 0032203131     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00840-2     Document Type: Article

References (15)

1. J. Perry, Thin Solid Films 135 (1986) 73.
2. W.D. Sproul, M.E. Graham, M.-S. Wong, P.J. Rudnik, Surf. Coat. Technol. 61 (1993) 139.
3. Y.L. Su, J.S. Lin, Wear 170 (1993) 45.
4. R. Thom, L. Moore, W.D. Sproul, T.P. Chang, Surf. Coat. Technol. 62 (1993) 423.
5. T. Jamal, R.F. Bunsha, Thin Solid Films 73 (1980) 245.
6. S. Rmalingam, Thin Solid Films 118 (1984) 335.
7. I.L. Singer, S. Fayeulle, P.D. Ehni, Wear 149 (1991) 375.
8. J.A. Sue, H.H. Troue, Surf. Coat. Technol. 43/44 (1990) 709.
9. A. Schrö, W. Ensinger, G.K. Wolf, Mater. Sci. Eng. A 140 (1991) 625.
10. Y.L. Su, S.H. Yao, C.T. Wu, Wear 199 (1996) 132.
11. J.P. Terrat, A. Gaucher, H. Hadj-Rabah, R.Y. Fillit, Surf. Coat. Technol. 45 (1991) 59.
12. Z.P. Huang, Y. Sun, T. Bell, Wear 173 (1994) 13.
13. G. Ebersbach, D. Fabian, W. Wuttke, H.A. Jehn, Surf. Coat. Technol. 59 (1993) 165.
14. W. Ensinger, M. Kiuchi, Y. Horino, A. Chayahara, K. Fujii, M. Satou, Nucl. Instrum. Methods Phys. Res. B 59/60 (1991) 259.
15. W.C. Oliver, G.M. Pharr, J. Mater. Res. 7 (1992) 1564.