Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement

Sensors and Actuators, A: Physical

Volumn 125, Issue 2, 2006, Pages 590-596

  Huang, Qiangxian ^a,b   Gonda, Satoshi ^a   Misumi, Ichiko ^a   Sato, Osamu ^a   Keem, Taeho ^a   Kurosawa, Tomizo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b HEFEI UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

1D grating; AFM; Hysteretic characteristic; Lateral dimension; Nonlinear characteristic; Piezoelectric actuator; Reference standard

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTROL SYSTEM ANALYSIS; DEFORMATION; INTERFEROMETERS; MICROSCOPES; NONLINEAR CONTROL SYSTEMS; PIEZOELECTRIC DEVICES; SIGNAL PROCESSING;

1D GRATING; AFM; HYSTERETIC CHARACTERISTICS; LATERAL DIMENSION; NONLINEAR CHARACTERISTICS; PIEZOELECTRIC ACTUATORS; REFERENCE STANDARD;

ACTUATORS;

EID: 29144521760     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.08.034     Document Type: Article

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