Impacts of probe-tip tilt on scanning probe microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3394-3398

  Mizuno, Fumio ^a   Misumi, Ichiko ^b   Gonda, Satoshi ^b   Kurosawa, Tomizo ^b  

^a MEISEI UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; CONTAMINATION; MEASUREMENT ERRORS; MEASUREMENT THEORY; SCANNING; SENSITIVITY ANALYSIS;

CRITICAL DIMENSIONS MEASUREMENT; MEASUREMENT UNCERTAINTY; SCANNING PROBE MICROSCOPY;

MICROSCOPIC EXAMINATION;

EID: 13244288703     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1813458     Document Type: Conference Paper

References (3)

1. F. Mizuno, M. Shimizu, K. Sasada, and T. Mizuno, J. Vac. Sci. Technol. B 15, 2177 (1997).
2. J. S. Villarrubia, J. Res. Natl. Inst. Stand. Technol. 102, 425 (1997).
3. S. Monta and Y. Sugawara, Appl. Surf. Sci. 140, 406 (1999).