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Volumn 37, Issue 2, 2006, Pages 169-176

The monomer inlet position effect on the fluorocarbon film deposited using RF plasma

Author keywords

Aromatic ring; C7F8; F C ratio; Photoluminescence; Plasma polymerization

Indexed keywords

ARGON; CHEMICAL REACTORS; DEPOSITION; MONOMERS; PHOTOLUMINESCENCE; PLASMA POLYMERIZATION; SURFACE ROUGHNESS; TOLUENE;

EID: 33646836567     PISSN: 03681653     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.