Characterization of porous low- k films using variable angle spectroscopic ellipsometry

Journal of Applied Physics

Volumn 99, Issue 8, 2006, Pages

  Othman, M T ^a   Lubguban, J A ^a   Lubguban, A A ^a   Gangopadhyay, S ^a   Miller, R D ^b   Volksen, W ^b   Kim, H C ^b  

^a UNIVERSITY OF MISSOURI   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MULTIGRADED LAYER POROUS FILMS; SACRIFICIAL PORE GENERATOR; SUBSTRATE-FILM INTERFACES; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY (VASE);

DATA REDUCTION; DIELECTRIC MATERIALS; ELLIPSOMETRY; NONDESTRUCTIVE EXAMINATION; POROSITY; REFRACTIVE INDEX; SUBSTRATES;

POROUS MATERIALS;

EID: 33646738438     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2189018     Document Type: Article

References (31)

1. K. Maex, M. R. Baklanov, D. Shamiyan, F. Iacopi, S. H. Brongersma, and Z. S. Yanovitskaya, J. Appl. Phys. 93, 8793 (2003).
2. D. Amans, S. Callards, A. Gagnaire, J. Joseph, G. Ledoux, and F. Huisken, J. Appl. Phys. 93, 4173 (2003).
3. http://public.itrs.net. November 2004.
4. C. J. Hawker, J. L. Hederick, R. D. Miller, and W. Volksen, U.S. Patent No. US 6,541,865 B2 (April 1, 2003).
5. E. Kondoh, M. R. Baklanov, E. Lin, D. Gidley, and A. Nakashima, Jpn. J. Appl. Phys., Part 2 40, L323 (2001).
6. S. Terada, T. Kinashi, and J. Spear, AIP Conf. Proc. 683, 546 (2003).
7. J. Ilavsky, A. J. Allen, G. G. Long, and P. R. Jemian, Rev. Sci. Instrum. 73, 1660 (2002).
8. A. A. Herrero, R. L. Heredero, E. Bernabeu, and D. Levy, Appl. Opt. 40, 527 (2001).
9. M. R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin, and F. N. Dultsev, J. Vac. Sci. Technol. B 18, 1385 (2000).
10. K. P. Mogilnikov, V. G. Polovinkin, F. N. Dultsev, and M. R. Baklanov, Mater. Res. Soc. Symp. Proc. 565, 81 (1999).
11. D. W. Gidley, W. E. Frieze, T. L. Dull, J. Sun, A. F. Yee, C. V. Nguyen, and D. Y. Yoon, Appl. Phys. Lett. 76, 1282 (2002).
12. H. G. Tompkins and W. A. McGahan, Spectroscopic Ellipsometery and Reflectometry: A User's Guide (Wiley, New York, 1999).
13. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1987).
14. J. Woollam, B. Johs, C. Herzinger, J. Hilfiker, R. Synowicki, and C. Bungay, Critical Review of Optical Science and Technology-Optical Metrology, Proc. SPIE Vol. CR72, 3-28 (1999).
15. D. Shamiryan, T. Abell, Q. T. Le, and K. Maex, Microelectron. Eng. 70, 341 (2003).
16. J. G. Webster, Wiley Encyclopedia of Electrical and Electronics Engineering Supplement (Wiley, New York, 2000), Vol. 1.
17. Hect, Optics, 4th ed. (Addison-Wesley, Reading, 2002).
18. M. Born and E. Wolf, Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light, 7th ed. (Cambridge University Press, Cambridge 1999).
19. F. L. Pedrotti and L. S. Pedrotti, Introduction to Optics, 2nd ed. (Prentice-Hall, Englewood Cliffs, NJ, 1993).
20. C. Himcinschi, M. Friedrich, C. Murray, I. Streiter, S. E. Schulz, T. Gessner, and D. R. T. Zahn, Semicond. Sci. Technol. 16, 806 (2001).
21. H. C. Kim, J. B. Wilds, C. R. Kreller, W. Volksen, P. J. Brock, V. Y. Lee, T. Magbitang, J. L. Hedrick, C. J. Hawker, and R. D. Miller, Adv. Mater. (Weinheim, Ger.) 14, 1637 (2002).
22. J. A. Lubguban, J. Mater. Res. 19, 3224 (2004).
23. B. Lahlouh, J. A. Lubguban, G. Sivaraman, R. Gale, and S. Gangopadhyay, Electrochem. Solid-State Lett. 7, G338 (2004).
24. C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, and W. Paulson, J. Appl. Phys. 83, 3323 (1998).
25. E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, 1998).
26. A. V. Goncharenko, Phys. Rev. E 68, 041108 (2003).
27. D. E. Aspnes, Thin Solid Films 89, 249 (1982).
28. W. H. Press, B. P. Flannery, S. A. Teukolsky, and W. T. Vetterling, Numerical Recipes: The Art of Scientific Computing (Cambridge University Press, Cambridge, MA, 1988).
29. B. Johs, J. A. Woollam, C. M. Herzinger, J. Hilfiker, R. Synowicki, and C. L. Bungay, Critical Reviews of Optical Science and Technology-Optical Metrology, Proc. SPIE Vol. CR72, 29-58 (1999).
30. H.-C. Kim, W. Volksen, R. D. Miller, E. Huang, G. Yang, R. M. Briber, K. W. Shin, and S. K. Satija, Chem. Mater. 15, 609 (2003).
31. P. T. Liu, Electrochem. Solid-State Lett. 5, G11 (2002).